Our LMSSA precision cross table is used for the optical inspection of wafers in the semiconductor industry. A special feature is the cleanroom-compatible energy supply, which ensures low-noise operation with almost no particle contamination.
The LMSSA precision cross table is based on our LMSSA precision axes, which we offer as a standardized system in our product portfolio. The most important component and customization requirement was the special requirement for particle-free operation in a cleanroom-compatible application. Therefore, a flat cable routing system made of high-performance plastic is used that shows no visible wear and is abrasion-resistant. The open chamber systems make it easy to replace or add bendable stranding elements – with or without plugs – support chains or hoses.
Our precision systems – standardized systems that can be easily adapted to customer-specific applications.
Requirements:
- High precisionn
- Cleanroom-compatible cable carrier
- Limited installation space
- Fast response time on the part of the supplier
HIWIN components:
Fields of application:
